Reduced capacitance in vertical transistors by preventing excessive overlap between the gate and the source/drain

ABSTRACT

Embodiments of the invention are directed to a vertical FET device having gate and source or drain features. The device includes a fin formed in a substrate and a source or a drain region formed in the substrate. The device further includes a trench formed in the source or the drain region and a dielectric region formed in the trench. The device further includes a gate formed along vertical sidewalls of the fin and positioned such that a space between the gate and the source or the drain region includes at least a portion of the dielectric region. In some embodiments, the device further includes a bottom spacer formed over an upper surface of the dielectric region and positioned such that the space between the gate and the source or the drain region further includes at least a portion of the bottom spacer.

DOMESTIC PRIORITY

This application is a divisional of U.S. application Ser. No.15/282,398, titled “REDUCED CAPACITANCE IN VERTICAL TRANSISTORS BYPREVENTING EXCESSIVE OVERLAP BETWEEN THE GATE AND THE SOURCE/DRAIN”filed Sep. 30, 2016, the contents of which are incorporated by referenceherein in its entirety.

BACKGROUND

The present invention relates in general to fabrication methods andresulting structures for transistors formed in integrated circuits(ICs). More specifically, the present invention relates to improvedsystems, fabrication methods and resulting structures for vertical fieldeffect transistors (FET) that reduce unwanted capacitance caused byexcessive overlap between the gate region and the source/drain regions.

Semiconductor devices are typically formed in active regions of a wafer.In an IC having a plurality of metal oxide semiconductor field effecttransistors (MOSFETs), each MOSFET has a source and a drain that areformed in the active region of the semiconductor wafer or substrate byimplanting n-type or p-type impurities therein. A MOSFET can beconsidered a planar device because its channel extends laterally withrespect to the major surface of the device substrate. Thus, currentflows laterally through the planar MOSFET channel. One type ofnon-planar MOSFET is known generally as a vertical FET. In order todecrease gate pitch (i.e., the center-to-center distance betweenadjacent gate structures) and increase device density on the wafer, thechannel region of a vertical FET is substantially perpendicular withrespect to the major surface of the device substrate. Thus, currentflows vertically through the non-planar vertical FET channel.

SUMMARY

Embodiments of the present invention are directed to a method of forminggate and source or drain features of a vertical FET. The method includesforming a fin on a substrate and forming a source or a drain region inan upper region of the substrate. The method further includes forming adielectric region over an upper surface of the source or the drainregion. The method further includes forming a gate along verticalsidewalls of the fin such that a space between the gate and the sourceor the drain region includes at least a portion of the dielectricregion.

Embodiments of the present invention are further directed to a method offorming gate and source or drain features of a vertical FET. The methodincludes forming a fin in a substrate and forming a source or a drainregion in the substrate. The method further includes forming a trench inthe source or the drain region and forming a dielectric region in thetrench. The method further includes forming a gate along verticalsidewalls of the fin such that a space between the gate and the sourceor the drain region includes at least a portion of the dielectricregion. The method further includes forming a bottom spacer over anupper surface of the dielectric region such that the space between thegate and the source or the drain region further includes at least aportion of the bottom spacer.

Embodiments of the present invention are further directed to a verticalFET device having gate and source or drain features. The device includesa fin formed in a substrate and a source or a drain region formed in thesubstrate. The device further includes a trench formed in the source orthe drain region and a dielectric region formed in the trench. Thedevice further includes a gate formed along vertical sidewalls of thefin and positioned such that a space between the gate and the source orthe drain region includes at least a portion of the dielectric region.In some embodiments, the device further includes a bottom spacer formedover an upper surface of the dielectric region and positioned such thatthe space between the gate and the source or the drain region furtherincludes at least a portion of the bottom spacer.

Additional features and advantages are realized through the techniquesdescribed herein. Other embodiments and aspects are described in detailherein. For a better understanding, refer to the description and to thedrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The subject matter which is regarded as the present invention isparticularly pointed out and distinctly claimed in the claims at theconclusion of the specification. The foregoing and other features andadvantages are apparent from the following detailed description taken inconjunction with the accompanying drawings in which:

FIG. 1 depicts cross-sectional view of a know configuration of planarMOSFET;

FIG. 2 depicts a diagram of semiconductor structure after initialfabrication stages according to one or more embodiments;

FIG. 3 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 4 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 5 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 6 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 7 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 8 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 9 depicts a diagram of semiconductor structure after intermediatefabrication stages according to one or more embodiments;

FIG. 10 depicts a diagram of semiconductor structure after finalfabrication stages according to one or more embodiments; and

FIG. 11 depicts a flow diagram illustrating a methodology according toone or more embodiments.

In the accompanying figures and following detailed description of theembodiments, the various elements illustrated in the figures areprovided with three or four digit reference numbers. The leftmostdigit(s) of each reference number corresponds to the figure in which itselement is first illustrated.

DETAILED DESCRIPTION

It is understood in advance that, although this description includes adetailed description of the formation and resulting structures for aspecific type of vertical FET, implementation of the teachings recitedherein are not limited to a particular type of vertical FET or ICarchitecture. Rather embodiments of the present invention are capable ofbeing implemented in conjunction with any other type of vertical FET orIC architecture, now known or later developed.

Various embodiments of the present invention are described herein withreference to the related drawings. Alternative embodiments can bedevised without departing from the scope of this invention. It is notedthat various connections and positional relationships (e.g., over,below, adjacent, etc.) are set forth between elements in the followingdescription and in the drawings. These connections and/or positionalrelationships, unless specified otherwise, can be direct or indirect,and the present invention is not intended to be limiting in thisrespect. Accordingly, a coupling of entities can refer to either adirect or an indirect coupling, and a positional relationship betweenentities can be a direct or indirect positional relationship. As anexample of an indirect positional relationship, references in thepresent description to forming layer “A” over layer “B” includesituations in which one or more intermediate layers (e.g., layer “C”) isbetween layer “A” and layer “B” as long as the relevant characteristicsand functionalities of layer “A” and layer “B” are not substantiallychanged by the intermediate layer(s).

The following definitions and abbreviations are to be used for theinterpretation of the claims and the specification. As used herein, theterms “comprises,” “comprising,” “includes,” “including,” “has,”“having,” “contains” or “containing,” or any other variation thereof,are intended to cover a non-exclusive inclusion. For example, acomposition, a mixture, process, method, article, or apparatus thatcomprises a list of elements is not necessarily limited to only thoseelements but can include other elements not expressly listed or inherentto such composition, mixture, process, method, article, or apparatus.

Additionally, the term “exemplary” is used herein to mean “serving as anexample, instance or illustration.” Any embodiment or design describedherein as “exemplary” is not necessarily to be construed as preferred oradvantageous over other embodiments or designs. The terms “at least one”and “one or more” can be understood to include any integer numbergreater than or equal to one, i.e. one, two, three, four, etc. The terms“a plurality” can be understood to include any integer number greaterthan or equal to two, i.e. two, three, four, five, etc. The term“connection” can include both an indirect “connection” and a direct“connection.”

Semiconductor devices are used in a variety of electronic andelectro-optical applications. ICs are typically formed from variouscircuit configurations of discrete components (e.g., transistors,capacitors, resistors, semiconductor devices, etc.) and conductiveinterconnect layers (known as metallization layers) formed onsemiconductor wafers. Alternatively, semiconductor devices can be formedas monolithic devices, e.g., discrete devices. Semiconductor devices andconductive interconnect layers are formed on semiconductor wafers bydepositing many types of thin films of material over the semiconductorwafers, patterning the thin films, doping selective regions of thesemiconductor wafers, etc.

For the sake of brevity, conventional techniques related tosemiconductor device and IC fabrication may or may not be described indetail herein. Moreover, the various tasks and process steps describedherein can be incorporated into a more comprehensive procedure orprocess having additional steps or functionality not described in detailherein. In particular, various steps in the manufacture of semiconductordevices and semiconductor-based ICs are well known and so, in theinterest of brevity, many conventional steps will only be mentionedbriefly herein or will be omitted entirely without providing thewell-known process details.

By way of background, however, a more general description of thesemiconductor device fabrication processes that can be utilized inimplementing one or more embodiments of the present invention will nowbe provided. Although specific fabrication operations used inimplementing one or more embodiments of the present invention can beindividually known, the described combination of operations and/orresulting structures of the present invention are unique. Thus, theunique combination of the operations described in connection with thepresent invention utilize a variety of individually known physical andchemical processes performed on a semiconductor (e.g., silicon)substrate, some of which are described in the following paragraphs.

The semiconductor device structures of the present invention can befabricated in a number of ways using a number of different tools. Ingeneral, though, the methodologies and tools are used to form structureswith dimensions in the micrometer and nanometer scale. Themethodologies, i.e., technologies, employed to fabricate thesemiconductor device structures of the present invention have beenadopted from IC technology. For example, semiconductor device structuresare built on wafers and are realized in films of material patterned byphotolithographic processes on the top of a wafer. In particular, thefabrication of semiconductor device structures uses four basic buildingblocks: (i) deposition of thin films of material on a substrate, (ii)applying a patterned mask on top of the films by photolithographicimaging, (iii) semiconductor doping, and/or (iv) etching the filmsselectively to the mask.

In general, deposition is any process that grows, coats, or otherwisetransfers a material onto the wafer. Available technologies includephysical vapor deposition (PVD), chemical vapor deposition (CVD),electrochemical deposition (ECD), molecular beam epitaxy (MBE) and morerecently, atomic layer deposition (ALD) among others. Removal/etching isany process that removes material from the wafer. Examples include etchprocesses (either wet or dry), and chemical-mechanical planarization(CMP), and the like. Semiconductor doping is the modification ofelectrical properties by doping, for example, transistor sources anddrains, generally by diffusion and/or by ion implantation. These dopingprocesses are followed by furnace annealing or by rapid thermalannealing (RTA). Annealing serves to activate the implanted dopants.Films of both conductors (e.g., poly-silicon, aluminum, copper, etc.)and insulators (e.g., various forms of silicon dioxide, silicon nitride,etc.) are used to connect and isolate transistors and their components.Selective doping of various regions of the semiconductor substrateallows the conductivity of the substrate to be changed with theapplication of voltage. By creating structures of these variouscomponents, millions of transistors can be built and wired together toform the complex circuitry of a modern microelectronic device.

Fundamental to the above-described fabrication processes issemiconductor lithography, i.e., the formation of three-dimensionalrelief images or patterns on the semiconductor substrate for subsequenttransfer of the pattern to the substrate. In semiconductor lithography,the patterns are a light sensitive polymer called a photo-resist. Tobuild the complex structures that make up a transistor and the manywires that connect the millions of transistors of a circuit, lithographyand etch pattern transfer steps are repeated multiple times. Eachpattern being printed on the wafer is aligned to the previously formedpatterns and slowly the conductors, insulators and selectively dopedregions are built up to form the final device.

Turning now to an overview of technologies that are more specificallyrelevant to embodiments of the present invention, semiconductor devicesare typically formed using active regions of a wafer. The active regionsare defined by isolation regions used to separate and electricallyisolate adjacent semiconductor devices. An example of a metal oxidesemiconductor field effect transistor (MOSFET) 100, which can be formedin the active region of an IC, is shown in FIG. 1. MOSFET 100 includes asource 112 and a drain 116 that are formed in an active region of asemiconductor layer by implanting n-type or p-type impurities in thelayer of semiconductor material. Disposed between the source and thedrain is a channel region 114, which is formed above a body region or asubstrate 102. Disposed above the channel region 114 is a gate electrode120, which is spaced apart from the channel region 114 by a gatedielectric layer 122.

As shown in FIG. 1, there is overlap between the gate 120 and the source112, as well as between the gate 120 and the drain 116. Thegate/source/drain overlaps ensure there is a continuous channel 114.Some unwanted capacitive coupling is present between the gate 120 andthe source 112, as well as between the gate 120 and the drain 116.Unwanted capacitive coupling between the gate 120 and either the source112 or the drain 116 can slow the switching speed of the MOSFET 100.However, unwanted capacitive coupling can be mitigated in MOSFET designsby keeping the gate/source/drain overlaps within a range, which istypically approximately 3-4 nanometers (nm).

Alternative MOSFET device structures have been proposed to improvedevice performance, particularly at the interface between the gate andthe channel. One type of MOSFET is a non-planar device known generallyas a fin-type field effect transistor (FinFET). The basic electricallayout and mode of operation of a FinFET device does not differsignificantly from a traditional field effect transistor (FET). Incontrast to a planar MOSFET, however, the source, drain and channelregions of a FinFET are built as a three-dimensional fin/bar on top of alocal shallow trench isolation (STI) region and a semiconductorsubstrate. The gate electrode is wrapped over the top and sides of amiddle portion of the fin such that the grate electrode is substantiallyperpendicular with respect to the fin. This middle portion of the fin,which is under the gate electrode, functions as the channel and providesan increased effective channel width compared to planar MOSFETs. Thesource and drain regions are the portions of the fin on either side ofthe channel that are not under the gate electrode. The source and drainregions can be suitably doped to produce the desired FET polarity, as isknown in the art. The dimensions of the fin establish the effectivechannel length for the transistor.

As non-planar MOSFETs are scaled to smaller dimensions/geometries forhigher device density, so-called vertical FETs have been developed.Unlike FinFET structures, the entire fin of a nanowire vertical FETfunctions as the channel region. The gate, which is parallel to thevertical sidewalls of the fin, wraps around the fin sidewalls.Source/drain regions are formed above and below the fin channel. Inorder to decrease gate pitch (i.e., the center-to-center distancebetween adjacent gate structures) and increase device density of atypical vertical FET, it is desirable to form the fin/channel region andthe surrounding gate region with relatively high aspect ratios. In otherwords, it is desirable for the fin/channel region and the gate region toeach be much taller than wide.

A MOSFET can be considered a planar device because its channel extendslaterally with respect to the major surface of the device substrate.Thus, current flows laterally through the planar MOSFET channel. In avertical FET, where the channel region is substantially perpendicularwith respect to the major surface of the device substrate, current flowsvertically through the non-planar vertical FET channel.

Although vertical FETs reduce the transistor footprint and provide someimproved performance characteristics over other MOSFET configurations,some performance aspects of known vertical FETs configurations are notoptimized. For example, because the gate wraps extends along the finchannel sidewall and wraps around the fin, in know vertical FETconfigurations, the gate structure can be positioned almost entirelyover the source/drain regions, separated only by a relatively thinbottom spacer formed from a high-k dielectric material. Accordingly,known vertical FET designs include an excessive amount ofgate/source/drain overlap, which causes a large amount of capacitivecoupling between the gate and the source/drain. As previously notedherein, unwanted capacitive coupling between the gate and the source orthe drain (or both) can slow the switching speed of the transistor. Ifthe unwanted capacitive coupling is large enough, the transistorswitching speed can exceed an acceptable range.

Turning now to an overview of aspects of the present invention,embodiments of the present invention provide improved fabricationmethodologies and resulting structures for vertical FETs that reduce theimpact of unwanted capacitance due to gate/source/drain overlap. In oneor more embodiments, a portion of the bottom source/drain region that isbelow the vertical FET gate is replaced with a dielectric region. Thus,the dielectric region is positioned between the vertical gate and thebottom source/drain region, thereby increasing the distance between thevertical gate and the bottom source/drain region and reducing thecapacitive coupling between the vertical FET gate and the bottomsource/drain region. The vertical height dimension of the dielectricregion is selected to bring any capacitive coupling between the verticalFET gate and the source/drain to within an acceptable range for theparticular vertical FET design.

Turning now to a more detailed description of the aspects of the presentinvention, FIG. 2 depicts a semiconductor structure 200 after initialfabrication stages according to one or more embodiments. In one or moreembodiments, the structure 200 will be, after completion of thefabrication process, adjacent vertical FET structures having reducedunwanted capacitance due to gate/source/drain overlap according toembodiments of the present invention. As shown in FIG. 2, a hard masklayer (not shown) is formed over a substrate 202. The hard mask layer ispatterned, and then hard masks (HM) 210 and silicon fins 204, 214 areformed by any suitable fin formation process (e.g., applying ananisotropic etch process). Because there is no stop layer on substrate202, the etch process is time based. Hard masks 208 can be a siliconnitride material (e.g., Si₃Ni₄).

In the embodiment shown in FIG. 2, fins 204, 214 are etched in a mannerthat forms upper fin regions 206, 216 and lower base regions 208, 218.To form the upper fin regions 206, 216, the etch is configured toinitially etch the fins 204, 214 in a direction that is substantiallyperpendicular with respect to the major surface of the substrate, whichresults in the sidewalls of the upper fin regions 206, 216 beingsubstantially perpendicular with respect to the major surface of thesubstrate. After the upper fin regions 206, 216 are formed, the etchconfiguration is switched and applied to the structure 200 in order toetch the fins 204, 214 in a direction that is substantially angled(i.e., non-perpendicular and non-planar) with respect to the majorsurface of the substrate, which results in the formation of the lowerbase regions 208, 218 having sidewalls that are substantially angled(i.e., non-perpendicular and non-planar) with respect to the majorsurface of the substrate. The sidewall of the lower base regions 208,218 are also referred to herein as upper surfaces of the lower baseregions 208, 218. Each of the lower base regions 208, 218 forms aportion of trenches 220, which, in effect surround the fins 204, 214 insubstantially the same manner as the vertical FET gate 804, which isshown in FIGS. 8-10 and described in greater detail later in thisdescription.

In FIG. 3, sacrificial vertical spacers 302, 304 are formed along andaround the sidewalls of the upper fin regions 206, 216. Spacers 302, 304can be formed using a spacer pull down formation process. Spacers 302,304 can also be formed using a sidewall image transfer (SIT) spacerformation process, which includes spacer material deposition followed bydirectional RIE of the deposited spacer material.

In FIG. 4, the lower base regions 208, 218 and the upper portion of thesubstrate 202 have been doped to form doped regions that will functionas the bottom source/drain regions 402. The dopants may be implantedusing an ion implantation and annealing process that implants dopantsinto the lower base regions 208, 218 and the upper portion of thesubstrate 202. The ion implantation process implants ions in the fins302 and the annealing process drives or evaporates the ions through thelower base regions 208, 218 and the upper portion of the substrate 202.Suitable annealing processes include laser annealing and RTA.

In FIG. 5, a low-k material (e.g., silicon dioxide) is deposited overthe doped bottom source/drain regions 402, and then polished back toform dielectric regions 502 that substantially fill the trenches 202(shown in FIGS. 2-4). For reasons described in more detail below,dielectric regions 502 are part of a structure that reduces capacitivecoupling between the vertical gate structures 802, 804 (shown in FIG. 8)and the bottom source/drain region 402. In one or more embodiments,dielectric regions 502 are a low-k material(s). In the embodimentsdescribed herein, the lower the k value for dielectric regions 502, theless capacitive coupling between the vertical gate structures 802, 804and the bottom source/drain region 402. Suitable low-k materials fordielectric regions 502 include silicon oxide and carbon/boron dopedsilicon nitride.

In FIG. 6, the sacrificial spacers 302, 304 are removed, and in FIG. 7,bottom spacers 702 are formed over the dielectric region 502. In one ormore embodiments, the bottom spacers 702 are a high-k dielectricmaterial such as silicon nitride.

In FIG. 8, a high-k layer 802 is formed along and around the sidewallsof upper fin regions 206, 216, and a work function metal 804 is formedalong and around the sidewalls of upper fin regions 206, 216, as well asover the bottom spacer 702. As shown, and in accordance with embodiments of the present invention, the dielectric region 502 is positionedbetween the gate 804 and the bottom source/drain region 402, therebyincreasing the distance between the gate 804 and the bottom source/drainregion 402 and reducing the capacitive coupling between the gate 804 andthe bottom source/drain region 402. The vertical height dimension of thedielectric region 502 is selected to bring any capacitive couplingbetween the gate 804 and the bottom source/drain 402 to within anacceptable range for the particular vertical FET design. As previouslynoted, the lower the k value for dielectric regions 502, the lesscapacitive coupling between the vertical gate structures 802, 804 andthe bottom source/drain region 402. Suitable low-k materials fordielectric regions 502 include silicon oxide and carbon/boron dopedsilicon nitride. Accordingly, an acceptable level of capacitive couplingbetween the vertical gate structures 802, 804 and the bottomsource/drain region 402 is provided by selecting design parameters thatinclude the distance from the vertical gate structures 802, 804 to thebottom source/drain region 402, as well as the k-level of the low-kmaterial that forms dielectric regions 502.

In FIG. 9, top spacers 902 are formed over the high-k layer 802 and thework function metal 804. In one or more embodiments, the top spacers 902are a high-k dielectric material such as silicon nitride.

In FIG. 10, the hard masks 210 are removed, and doped upper source/drainregions 1002, 1004 are formed in the upper fin regions 206, 216. In oneor more embodiments, the upper source/drain regions 1002, 1004 areformed by an epitaxial growth process that deposits a crystallineoverlayer of semiconductor material onto the exposed crystalline seedmaterial of the exposed silicon portions of the upper fin regions 206,216. Epitaxial materials can be grown from gaseous or liquid precursors.Epitaxial materials can be grown using vapor-phase epitaxy (VPE),molecular-beam epitaxy (MBE), liquid-phase epitaxy (LPE), or othersuitable process. Epitaxial silicon, silicon germanium, and/or carbondoped silicon (Si:C) silicon can be doped during deposition (in-situdoped) by adding dopants, n-type dopants (e.g., phosphorus or arsenic)or p-type dopants (e.g., boron or gallium), depending on the type oftransistor.

The terms “epitaxial growth and/or deposition” and “epitaxially formedand/or grown” mean the growth of a semiconductor material (crystallinematerial) on a deposition surface of another semiconductor material(crystalline material), in which the semiconductor material being grown(crystalline overlayer) has substantially the same crystallinecharacteristics as the semiconductor material of the deposition surface(seed material). In an epitaxial deposition process, the chemicalreactants provided by the source gases are controlled and the systemparameters are set so that the depositing atoms arrive at the depositionsurface of the semiconductor substrate with sufficient energy to moveabout on the surface such that the depositing atoms orient themselves tothe crystal arrangement of the atoms of the deposition surface.Therefore, an epitaxially grown semiconductor material has substantiallythe same crystalline characteristics as the deposition surface on whichthe epitaxially grown material is formed. For example, an epitaxiallygrown semiconductor material deposited on a {100} orientated crystallinesurface will take on a {100} orientation. In some embodiments, epitaxialgrowth and/or deposition processes are selective to forming onsemiconductor surfaces, and generally do not deposit material on exposedsurfaces, such as silicon dioxide or silicon nitride surfaces.

In some embodiments, the gas source for the deposition of epitaxialsemiconductor material include a silicon containing gas source, agermanium containing gas source, or a combination thereof. For example,an epitaxial silicon layer can be deposited from a silicon gas sourcethat is selected from the group consisting of silane, disilane,trisilane, tetrasilane, hexachlorodisilane, tetrachlorosilane,dichlorosilane, trichlorosilane, methylsilane, dimethylsilane,ethylsilane, methyldisilane, dimethyldisilane, hexamethyldisilane andcombinations thereof. An epitaxial germanium layer can be deposited froma germanium gas source that is selected from the group consisting ofgermane, digermane, halogermane, dichlorogermane, trichlorogermane,tetrachlorogermane and combinations thereof. While an epitaxial silicongermanium alloy layer can be formed utilizing a combination of such gassources. Carrier gases like hydrogen, nitrogen, helium and argon can beused.

FIG. 11 depicts a flow diagram illustrating a methodology 1100 accordingto one or more embodiments. Methodology 1100 begins at block 1102 byforming a fin in or on a substrate. In block 1104, a source or a drainregion is formed in an upper region of the substrate. In block 1106, adielectric region is formed over an upper surface of the source or thedrain region. In block 1108, a gate is formed along vertical sidewallsof the fin such that a space between the gate and the source or thedrain region includes at least a portion of the dielectric region. Inone or more embodiments, block 1106 is implemented by forming a trenchin the source or the drain region, and then forming the dielectricregion in the trench. In one or more embodiments, the trench is formedby forming the fin to include an upper fin region and a lower baseregion, wherein the lower base region includes an upper surface and abase width dimension that is greater than the width of the upper finregion. In one or more embodiments, the upper surface of the lower baseregion is formed at an angle with respect to a major surface of thesubstrate. In one or more embodiments, the angle is greater than zerodegrees and less than ninety degrees.

Thus, it can be seen from the foregoing detailed description andaccompanying illustrations that one or more embodiments of the presentinvention provide improved fabrication methodologies and resultingstructures for vertical FETs that reduce the impact of unwantedcapacitance due to gate/source/drain overlap. In one or moreembodiments, a portion of the bottom source/drain region that is belowthe vertical FET gate is replaced with a dielectric region. Thus, thedielectric region is positioned between the vertical gate and the bottomsource/drain region, thereby increasing the distance between thevertical gate and the bottom source/drain region and reducing thecapacitive coupling between the vertical FET gate and the bottomsource/drain region. The vertical height dimension of the dielectricregion is selected to bring any capacitive coupling between the verticalFET gate and the source/drain to within an acceptable range for theparticular vertical FET design.

The methods described herein are used in the fabrication of IC chips.The resulting integrated circuit chips can be distributed by thefabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

In some embodiments, various functions or acts can take place at a givenlocation and/or in connection with the operation of one or moreapparatuses or systems. In some embodiments, a portion of a givenfunction or act can be performed at a first device or location, and theremainder of the function or act can be performed at one or moreadditional devices or locations.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thepresent invention has been presented for purposes of illustration anddescription, but is not intended to be exhaustive or limited to the formdescribed. Many modifications and variations will be apparent to thoseof ordinary skill in the art without departing from the scope and spiritof the invention. The embodiments were chosen and described in order tobest explain the principles of the invention and the practicalapplication, and to enable others of ordinary skill in the art tounderstand the invention for various embodiments with variousmodifications as are suited to the particular use contemplated.

The flowchart and block diagrams in the figures illustrate thefunctionality and operation of possible implementations of systems andmethods according to various embodiments of the present invention. Insome alternative implementations, the functions noted in the block canoccur out of the order noted in the figures. For example, two blocksshown in succession can, in fact, be executed substantiallyconcurrently, or the blocks can sometimes be executed in the reverseorder, depending upon the functionality involved. The actions can beperformed in a differing order or actions can be added, deleted ormodified. Also, the term “coupled” describes having a signal pathbetween two elements and does not imply a direct connection between theelements with no intervening elements/connections therebetween. All ofthese variations are considered a part of the invention.

The terms “about,” “substantially,” “approximately,” and variationsthereof are intended to include the degree of error associated withmeasurement of the particular quantity based upon the equipmentavailable at the time of filing the application. For example, “about”can include a range of ±8% or 5%, or 2% of a given value.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the presentinvention. As used herein, the singular forms “a”, “an” and “the” areintended to include the plural forms as well, unless the context clearlyindicates otherwise. It will be further understood that the terms“comprises” and/or “comprising,” when used in this specification,specify the presence of stated features, integers, steps, operations,elements, and/or components, but do not preclude the presence oraddition of one or more other features, integers, steps, operations,element components, and/or groups thereof.

While the present invention has been described in detail in connectionwith only a limited number of embodiments, it should be readilyunderstood that the present invention is not limited to such describedembodiments. Rather, the present invention can be modified toincorporate any number of variations, alterations, substitutions orequivalent arrangements not heretofore described, but which arecommensurate with the spirit and scope of the present invention.Additionally, while various embodiments of the present invention havebeen described, it is to be understood that aspects of the presentinvention can include only some of the described embodiments.Accordingly, the present invention is not to be seen as limited by theforegoing description, but is only limited by the scope of the appendedclaims.

What is claimed is:
 1. A vertical field effect transistor (FET) devicehaving gate and source or drain features, the device comprising: a finformed in a substrate; a source or a drain region formed in thesubstrate; a trench formed in the source or the drain region; adielectric region formed in the trench; and a gate formed along verticalsidewalls of the fin and positioned such that a space between the gateand the source or the drain region comprises at least a portion of thedielectric region.
 2. The device of claim 1, wherein the fin includes anupper fin region and a lower base region.
 3. The device of claim 2,wherein the lower base region includes an upper surface and a base widthdimension.
 4. The device of claim 3, wherein the upper fin regionincludes an upper fin width dimension.
 5. The device of claim 4, whereinthe base width dimension is greater than the upper fin width dimension.6. The device of claim 5, wherein at least a portion of the trenchcomprises an upper surface of the lower base region.
 7. The device ofclaim 6, wherein the upper surface of the lower base region is formed atan angle with respect to a major surface of the substrate.
 8. The deviceof claim 7, wherein the angle comprises greater than zero degrees andless than ninety degrees.
 9. The device of claim 6, wherein thedielectric region comprises a low-k material and the bottom spacercomprises a high-k material.
 10. The device of claim 6, wherein at leasta portion of the source or the drain region is formed from the lowerbase region.
 11. A vertical field effect transistor (FET) device havinggate and source or drain features, the device comprising: a fin formedin a substrate; a source or a drain region formed in the substrate; atrench formed in the source or the drain region; a dielectric regionformed in the trench; a gate formed along vertical sidewalls of the finand positioned such that a space between the gate and the source or thedrain region comprises at least a portion of the dielectric region; anda bottom spacer formed over an upper surface of the dielectric regionand positioned such that the space between the gate and the source orthe drain region further comprises at least a portion of the bottomspacer.
 12. The device of claim 11, wherein the fin includes an upperfin region and a lower base region.
 13. The device of claim 12, whereinthe lower base region includes an upper surface and a base widthdimension.
 14. The device of claim 13, wherein the upper fin regionincludes an upper fin width dimension.
 15. The device of claim 14,wherein the base width dimension is greater than the upper fin widthdimension.
 16. The device of claim 15, wherein at least a portion of thetrench comprises an upper surface of the lower base region.
 17. Thedevice of claim 16, wherein the upper surface of the lower base regionis formed at an angle with respect to a major surface of the substrate.18. The device of claim 17, wherein the angle comprises greater thanzero degrees and less than ninety degrees.
 19. The device of claim 16,wherein the dielectric region comprises a low-k material and the bottomspacer comprises a high-k material.
 20. The device of claim 16, whereinat least a portion of the source or the drain region is formed from thelower base region.